| 热阴极鞍场离子源及其在光学薄膜技术中的应用 |
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| 引用本文： | 韩丽瑛,李彦民. 热阴极鞍场离子源及其在光学薄膜技术中的应用[J]. 清华大学学报(自然科学版), 1988, 0(3) |
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| 作者姓名： | 韩丽瑛 李彦民 |
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| 作者单位： | 现代应用物理系(韩丽瑛)，现代应用物理系(李彦民) |
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| 摘 要： | 论述了离子束辅助蒸发光学薄膜技术对离子源的要求，给出热阴极鞍场离子源的 特性及其用于辅助蒸发光学薄膜的实验研究结果。从ＺｒＯ２薄膜的光谱特性及折射率的 测量；膜层剖面的透射电子显微镜和膜层结构的Ｘ衍射分析证实了离子束辅助蒸发对 光学薄膜特性改善的效果。
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| 关 键 词： | 薄膜 离子束 蒸发 离子源 光学薄膜技术 |
Hot Cathode Saddle Field Ion Source and its Application in Optical Thin Film Deposition |
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| Han Liying, Li Yanmin. Hot Cathode Saddle Field Ion Source and its Application in Optical Thin Film Deposition[J]. Journal of Tsinghua University(Science and Technology), 1988, 0(3) |
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| Authors: | Han Liying Li Yanmin |
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| Affiliation: | Department of Modern Applied Physics |
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| Abstract: | The requirements of parameters of ion source for IAD of optical thin film are discussed. The characteristics of the hot cathode saddle field ion source and the results of its application for IAD of optical thin films are described. The improvements of microstructure of the ZrO2 film were verified from the electron microscope photographs and X-ray diffraction analysis. |
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| Keywords: | optical thin film IAD ion source technology of optical thin film |
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