DC magnetron power dependence of a-SiC:H IR absorption properties |
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Authors: | Marius D Stamate Iuliana Lazar Gabriel Lazar |
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Institution: | Department of Physics, Bacau University, Calea Marasesti 157, Bacau 600115, Romania |
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Abstract: | The infrared absorption properties of a-SiC:H thin films dependence with the dc magnetron power density were investigated. The films were deposited in a mixture of CH4, H2 and Ar. The target used was polycrystalline Si. We found that the dc magnetron power density has an important contribution to the film composition. There is a strong dependence of the Si-H and Si-C bonds with the dc power density. |
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Keywords: | 78 30j 78 30Jy 78 66Jg |
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