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Dislocation‐related photoluminescence imaging of mc‐Si wafers at room temperature
Authors:D. Mankovics  R. P. Schmid  T. Arguirov  M. Kittler
Abstract:We report on a method for fast detection of defect rich areas in multicrystalline silicon solar wafers. It is based on photoluminescence imaging of the whole wafers and detects both the band‐to‐band radiation as well as the dislocation specific radiation D1. To illustrate the capabilities of the method we examined 5.0 × 5.0 cm2 wafer pieces in different stages of their processing. The achieved resolution of the D1 images was ∼120 μm, within a total recording time of 550 ms.
Keywords:dislocations  imaging  photoluminescence  silicon
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