Ellipsometry of GeO2 films with Ge nanoclusters: Influence of the quantum-size effect on refractive index

Using the methods of scanning and spectral laser ellipsometry and Raman scattering spectroscopy, GeO₂ films containing Ge nanoclusters with a Ge/GeO₂ mole ratio of 1: 1 are studied. A substantial difference is found between the experimental spectral dependence of the complex permittivity of the films and the one calculated for the effective medium in the Bruggeman model. The distinction can be qualitatively explained by the influence of the quantum-size effect. With the use of theoretical models for quantitative analysis, this approach will make it possible to determine the phase composition and dimensions of the nanoclusters of germanium in a contactless way without destructing the film.