Sensitivity analysis of pull-in voltage for RF MEMS switch based on modified couple stress theory |
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Authors: | Junhua Zhu Renhuai Liu |
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Affiliation: | 1. Science and Technology on Reliability Physics and Application Technology of Electronic Component Laboratory, Guangzhou 510610, China;2. China Electronic Product Reliability and Environmental Testing Research Institute, Guangzhou 510610, China;3. Institute of Applied Mechanics, Jinan University, Guangzhou 510632, China |
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Abstract: | An approximate analytical model for calculating the pull-in voltage of a stepped cantilever-type radio frequency(RF) micro electro-mechanical system(MEMS) switch is developed based on the Euler-Bernoulli beam and a modified couple stress theory, and is validated by comparison with the finite element results. The sensitivity functions of the pull-in voltage to the designed parameters are derived based on the proposed model. The sensitivity investigation shows that the pull-in voltage sensitivities increase/decrease nonlinearly with the increases in the designed parameters. For the stepped cantilever beam, there exists a nonzero optimal dimensionless length ratio, where the pull-in voltage is insensitive. The optimal value of the dimensionless length ratio only depends on the dimensionless width ratio, and can be obtained by solving a nonlinear equation. The determination of the designed parameters is discussed, and some recommendations are made for the RF MEMS switch optimization. |
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Keywords: | radio frequency(RF) micro electro-mechanical system(MEMS) switch analytical solution stepped cantilever beam pull-in voltage modified couple stress theory sensitivity analysis |
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