The fitting of depth distributions of ion implanted analytes by split student-t functions: The physical basis and a recommended procedure

The non-standardized fitting of depth distributions of ion implanted analytes in solid matrices by arbitrarily chosen functions, as practiced at present, is unsatisfactory for the communication of results and is unacceptable for certification of ion implanted reference materials. Sampling theory applied to the nuclear slowing-down process of swift ions suggests that split Student-t functions should provide the mathematical representation sought. The exact shape and mathematical form of these functions are fully described and readily communicated by the use of five parameters (mode, two shape parameters and two scale parameters). A simple and fast fitting procedure is proposed.Dedicated to Professor Günther Tölg on the occasion of his 60th birthday