Principles of invariant embedding in the problem of self-sputtering of solids |
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Authors: | V V Manukhin |
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Institution: | (1) Moscow Power Engineering Institute (Technical University), ul. Krasnokazarmennaya 14, Moscow, 111250, Russia |
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Abstract: | Principles of invariant embedding are applied to investigation into the phenomenon of self-sputtering of solids. Integral
equations describing the flux of the sputtered atoms with regard for the boundary conditions are obtained. Approximate solutions
to the integral equation for a function that describes the energy and angular spectra of the atoms escaping from the material
surface in the case of self-sputtering are found. |
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Keywords: | |
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