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Principles of invariant embedding in the problem of self-sputtering of solids
Authors:V V Manukhin
Institution:(1) Moscow Power Engineering Institute (Technical University), ul. Krasnokazarmennaya 14, Moscow, 111250, Russia
Abstract:Principles of invariant embedding are applied to investigation into the phenomenon of self-sputtering of solids. Integral equations describing the flux of the sputtered atoms with regard for the boundary conditions are obtained. Approximate solutions to the integral equation for a function that describes the energy and angular spectra of the atoms escaping from the material surface in the case of self-sputtering are found.
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