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激光损伤He—Ne散射探测法研究
引用本文:胡建平,马红菊,李树刚,陈松林,MA Ping,马平.激光损伤He—Ne散射探测法研究[J].光学与光电技术,2008,6(3):22-25.
作者姓名:胡建平  马红菊  李树刚  陈松林  MA Ping  马平
作者单位:成都精密光学工程研究中心,四川,成都,610041
摘    要:介绍了He-Ne散射检测激光损伤的原理和实验装置,分析了散射信号及激光损伤的内在关系。实验表明,散射信号与薄膜的激光损伤尺度与形貌有关,对于本次实验,最小探测的激光损伤尺度为20μm左右。与显微镜和等离子体闪光法实验对比显示,He-Ne散射测量能判定薄膜激光损伤的发生,准确测量激光损伤闽值,测量结果与显微镜观察法符合较好。

关 键 词:高功率激光器  He-Ne散射  激光损伤  损伤阈值
收稿时间:2007/7/9

Laser Damage Detection by He-Ne Scattering
HU Jian-ping MA Hong-ju LI Shu-gang CHEN Song-lin MA Ping.Laser Damage Detection by He-Ne Scattering[J].optics&optoelectronic technology,2008,6(3):22-25.
Authors:HU Jian-ping MA Hong-ju LI Shu-gang CHEN Song-lin MA Ping
Institution:HU Jian-ping MA Hong-ju LI Shu-gang CHEN Song-lin MA Ping(Chengdu Fine Optical Engineering Research Center,Chengdu 610041,China)
Abstract:The laser damage detection by He-Ne scattering is studied in details by using Nd∶YAG damage testing system.The experiment result shows that the scattering signal can detect the coating damage, and the minimum detected size is up to 20 μm. Comparing with microscope and plasma spark, the results of damage threshold measured by scattering are well agreed with the method of microscope observation. The results show that He-Ne scattering technique is effective and reliable.
Keywords:high power laser  He-Ne scattering  laser induced damage  damage threshold  
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