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Transient optical properties of excimer-laser-irradiated polyimide |
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| Authors: | Z. Ball B. Hopp M. Csete F. Ignácz B. Rácz G. Szabó R. Sauerbrey |
| Affiliation: | (1) Department of Electrical and Computer Engineering and Rice Quantum Institute, Rice University, P. O. Box 1892, 77251 Houston, TX, USA;(2) Research Group on Laser Physics of the Hungarian Academy of Sciences, Dóm Tér 9, H-6720 Szeged, Hungary;(3) Department of Optics and Quantum Electronics, JATE University, Dóm Tér 9, H-6720 Szeged, Hungary;(4) Institute for Optics and Quantum Electronics, Friedrich-Schiller University, Max-Wien-Platz 1, D-07743 Jena, Germany |
| Abstract: | Experiments involving time-resolved scattering and transmission in ArF (193 nm) excimer-laser-irradiated polyimide are reported. Scattering experiments determined that constituents of the carbon layer responsible for laser-induced electrical conductivity form between 150 and 400 ns after the excimer pulse. Transmission experiments indicate that absorbing carbon is present before the formation of organized crystallites responsible for electrical conduction and scattering. |
| Keywords: | 42.10 81.60 71.30 |
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