| 氧对铅锡碲薄膜电阻率的影响 |
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| 引用本文： | 陈祝,杨成韬,张树人,杨邦朝.氧对铅锡碲薄膜电阻率的影响[J].电子元件与材料,2003,22(7):11-13,16. |
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| 作者姓名： | 陈祝 杨成韬 张树人 杨邦朝 |
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| 作者单位： | 电子科技大学微电子与固体电子学院,四川,成都,610054 |
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| 摘 要： | 氧吸收或氧化对金属电阻膜、合金电阻膜及金属陶瓷膜的影响及作用机理差别很大。淀积不同厚度的铅锡碲合金膜暴露在氧气或大气中, 其电阻随时间发生明显的变化,电阻的变化是随着膜厚的增加、基片温度的增加呈下降趋势,比较了金属氧化膜、合金电阻膜及金属陶瓷膜中的氧对电阻值的不同影响。铅锡碲氧吸收模型解释了其电阻变化机理,并进一步得到XPS光电子色谱分析的支持。
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| 关 键 词： | 电阻薄膜 铅锡碲合金 氧吸收 |
| 文章编号： | 1001-2028(2003)07-0011-03 |
Effect of Oxigen on Resistivity of Pb-Sn-Te Film |
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| CHEN Zhu,YANG Cheng-tao,ZHANG Shu-ren,YANG Bang-cao.Effect of Oxigen on Resistivity of Pb-Sn-Te Film[J].Electronic Components & Materials,2003,22(7):11-13,16. |
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| Authors: | CHEN Zhu YANG Cheng-tao ZHANG Shu-ren YANG Bang-cao |
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| Abstract: | The effects of oxygen absorption and oxidation on the resistor films of metal, alloy and cermet, and their operation mechanism are quite different. The films of Pb0.8 Sn0.2Te different in thickness were deposited by flash evaporation method. Their resistance change considerably when exposed to oxygen or atmosphere, and decrease with the increase of the film thickness and the substrate temperature. The effects of the absorbed oxygen on the resistance of the films of metal, alloy and cermet were compared. The mechanism of the resistance change can be explained by the oxygen absorption model, which has been confirmed by the XPS analysis. |
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| Keywords: | resistor film Pb-Sn-Te alloy oxygen absorption |
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