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High-resolution secondary ion mass spectrometry depth profiling of nanolayers |
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| Authors: | Sergey V Baryshev Alexander V Zinovev C Emil Tripa Michael J Pellin Qing Peng Jeffrey W Elam Igor V Veryovkin |
| Affiliation: | Materials Science Division, Argonne National Laboratory, 9700 S. Cass Ave., Argonne, IL, 60439, USA. sbaryshev@anl.gov. |
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