Photoetching of spherical microlenses on glasses using a femtosecond laser |
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| Authors: | Hewei Liu Feng Chen Xianhua Wang Qing Yang Dongshi Zhang Jinhai Si Xun Hou |
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| Institution: | aKey Laboratory for Physical Electronics and Devices of the Ministry of Education and Shaanxi Key Laboratory of Photonic Technology for Information, School of Electronics and Information Engineering, Xi’an Jiaotong University, No. 28, Xianning West Road, Xi’an 710049, PR China;bState Key Laboratory for Manufacturing Systems Engineering, Xi’an Jiaotong University, No. 28, Xianning West Road, Xi’an 710049, PR China |
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| Abstract: | We fabricated spherical microlenses on optical glasses by femtosecond laser direct writing (FLDW) in ambient air. To achieve good appearances of the microlenses, a meridian-arcs scanning method was used after a selective multilayer removal process with spiral scanning paths. A positive spherical microlens with diameter of 48 μm and height of 13.2 μm was fabricated on the surface of the glass substrate. The optical performances of the microlens were also tested. Compared to the conventional laser direct writing (LDW) technique, this work could provide an effective method for precise shape-controlled fabrication of three-dimensional (3D) microstructures with curved surfaces on difficult-to-cut materials for practical applications. |
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| Keywords: | Microlenses Femtosecond laser pulses Laser direct writing Glasses |
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