基于双相延迟模型的飞秒激光烧蚀金属模型

为了分析飞秒激光烧蚀过程,在双相延迟模型的基础上建立了双曲型热传导模型.模型中考虑了靶材的加热、蒸发和相爆炸,还考虑了等离子体羽流的形成和膨胀及其与入射激光的相互作用,以及光学和热物性参数随温度的变化.研究结果表明:等离子体屏蔽对飞秒激光烧蚀过程有重要的影响,特别是在激光能量密度较高时;两个延迟时间的比值对飞秒激光烧蚀过程中靶材的温度特性和烧蚀深度有较大的影响;飞秒激光烧蚀机制主要以相爆炸为主.飞秒激光烧蚀的热影响区域较小,而且热影响区域的大小受激光能量密度的影响较小.计算结果与文献中实验结果的对比表明基于双相延迟模型的飞秒激光烧蚀模型能有效对飞秒激光烧蚀过程进行模拟.

A model of femtosecond laser ablation of metal based on dual-phase-lag model

Femtosecond laser ablation possesses a variety of applications due to its better control, high power density, smaller heat-affected zone, minimal collateral material damage, lower ablation thresholds, and excellent mechanical properties. The non-Fourier effect in heat conduction becomes significant when the heating time becomes extremely small. In order to analyze the femtosecond laser ablation process, a hyperbolic heat conduction model is established based on the dual-phase-lag model. Taken into account in the model are the effect of heat source, laser heating of the target, the evaporation and phase explosion of the target material, the formation and expansion of the plasma plume, and interaction of the plasma plume with the incoming laser. Temperature-dependent optical and thermophysical properties are also considered in the model due to the fact that the properties of the target will change over a wide range in the femtosecond laser ablation process. The effects of the plasma shielding, the ratio of the two delay times, and laser fluence are discussed and the effectiveness of the model is verified by comparing the simulation results with the experimental results. The results show that the plasma shielding has a great influence on the femtosecond laser ablation process, especially when the laser fluence is high. The ratio between the two delay times (the ratio B) has a great influence on the temperature characteristic and ablation characteristic in the femtosecond laser ablation process. The augment of the ratio B will increase the degree of thermal diffusion, which will lower down the surface temperature and accelerate the ablation rate after the ablation has begun. The ablation mechanism of femtosecond laser ablation is dominated by phase explosion. The heat affected zone of femtosecond laser ablation is small, and the heat affected zone is less affected by laser fluence. The comparison between the simulation results and the experimental results in the literature shows that the model based on the dual-phase-lag model can effectively simulate the femtosecond laser ablation process.