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Metal‐Organic Chemical Vapor Deposition of Aluminum Scandium Nitride |
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| Authors: | Stefano Leone Jana Ligl Christian Manz Lutz Kirste Theodor Fuchs Hanspeter Menner Mario Prescher Joachim Wiegert Agn&#x; ukauskait&#x; Ruediger Quay Oliver Ambacher |
| Institution: | Stefano Leone,Jana Ligl,Christian Manz,Lutz Kirste,Theodor Fuchs,Hanspeter Menner,Mario Prescher,Joachim Wiegert,Agnė Žukauskaitė,Ruediger Quay,Oliver Ambacher |
| Abstract: | |
| Keywords: | AlScN aluminum scandium nitride high electron mobility transistors metal-organic chemical vapor deposition ScAlN vapor pressures |