基于纳米压痕的氧化镓晶体断裂韧度检测方法研究

为了快捷、精准测量脆性易解理氧化镓晶体的断裂韧度,为氧化镓精密加工提供理论依据。采用G200纳米压痕仪对氧化镓晶体进行纳米压痕试验,通过扫描电子显微镜分析压痕形貌,分别采用纳米压痕法、能量法两种方法计算断裂韧度。纳米压痕法测得(010)面氧化镓晶体的断裂韧度为0.769 MPa·m1/2;能量法测得其断裂韧度为0.782 MPa·m1/2。与传统的断裂韧度检测方法相比,基于纳米压痕仪的压痕法和能量法能够微损伤快速检测脆性材料的断裂韧度。能量法是更精准、更便捷的纳米级断裂韧度检测方法。

Research on Testing Method for Fracture Toughness of Gallium Oxide Crystals Based on Nanoindentation

In order to quickly and accurately measure the fracture toughness of brittle cleavable gallium oxide crystals,to provide a theoretical basis for the precise processing of gallium oxide.A G200 nanoindenter was used to perform a nanoindentation test on gallium oxide crystals.The indentation morphology was analyzed by a scanning electron microscope.The indentation method and the energy method were used to calculate fracture toughness.The fracture toughness of the(010)plane gallium oxide crystal was 0.769 MPa·m1/2,and the fracture toughness of the(010)plane was 0.782 MPa·m1/2.Compared with the traditional fracture toughness testing method,the indentation method and energy method based on nanoindenter can quickly test the fracture toughness of brittle materials with micro damage.Energy method is a more accurate and convenient method for testing nano-scale fracture toughness.