Deposition of refractory coatings by LCVD |
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| Authors: | I Zergioti A Zervaki A Hatziapostolou G Haidemenopoulos E Hontzopoulos |
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| Institution: | (1) Institute of Electronic Structure and Laser, Foundation for Research and Technology-Hellas, PO Box 1527, GR-711 10 Heraklion, Greece;(2) Metallurgical Industrial Research and Technological Development Centre, A' Industrial area of Volos, GR-385 00 Volos, Greece;(3) Department of Mechanical Engineering, University of Thessaly, GR-383 34 Volos, Greece |
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| Abstract: | TiC layers have been successfully deposited locally on tool steel specimens and real small industrial tools in order to improve their mechanical and corrosion properties. TiC films have been produced by the pyrolytic laser chemical vapour deposition technique, using a low power RF-modulated CO2 laser and a gas mixture of TiCl4/CCl4/H2/H/Ar. The surface temperature was monitored by a microcomputer-based feedback loop system that was specially developed and integrated to control the laser. SEM, EDX, XRD and TEM analysis showed that close stoichiometric TiC (fcc structure, lattice constant a=4.2Å) was deposited in the films with nanocrystalline structure. The microhardness of the coatings was in the range 2500–3200HK. Furthermore, an ArF excimer laser was used to enhance the deposition rate. |
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