| Nb掺杂TiO_2纳米管的制备及其氢敏特性 |
| |
| 引用本文： | 白硕,丁冬雁,宁聪琴,秦锐,常程康,李明,毛大立.Nb掺杂TiO_2纳米管的制备及其氢敏特性[J].微纳电子技术,2010,47(3). |
| |
| 作者姓名： | 白硕 丁冬雁 宁聪琴 秦锐 常程康 李明 毛大立 |
| |
| 作者单位： | 1. 上海交通大学,材料科学与工程学院,微电子材料与技术研究所,金属基复合材料国家重点实验室,上海,200240
2. 中国科学院,上海硅酸盐研究所,高性能陶瓷和超微结构国家重点实验室,上海,200050 |
| |
| 基金项目： | 国家863计划(2006AA02A1);;国家自然科学基金(60641004);;上海市浦江人才计划(07pj14047) |
| |
| 摘 要： | 以Ti35Nb合金为基材,通过阳极氧化和中温热处理制备了Nb掺杂TiO2纳米管阵列。通过掩模版和磁控溅射技术在纳米管阵列表面形成了Pt电极,随后在低浓度H2气氛中测试了Nb掺杂TiO2纳米管阵列的氢敏性能。实验结果表明阳极氧化温度是影响纳米管生长的一个重要因素,在阳极氧化电压为15V和阳极氧化温度为30℃的条件下可以获得均匀开口的非晶纳米管阵列。将非晶纳米管在450℃热处理后可以获得锐钛矿结构纳米管阵列。氢传感实验结果表明,Nb掺杂TiO2纳米管对低浓度气氛具有室温氢敏特性。以上实验结果表明,通过合金化设计和阳极氧化可以制备出具有室温氢传感特性的掺杂纳米管阵列。
|
| 关 键 词： | 氢气传感器 氧化钛 纳米管 阳极氧化 掺杂效应 |
Fabrication and Hydrogen Sensing Properties of Nb-Doped TiO_2 Nanotubes |
| |
| Bai Shuo,Ding Dongyan,Ning Congqin,Qin Rui,Chang Chengkang,Li Ming,Mao Dali.Fabrication and Hydrogen Sensing Properties of Nb-Doped TiO_2 Nanotubes[J].Micronanoelectronic Technology,2010,47(3). |
| |
| Authors: | Bai Shuo Ding Dongyan Ning Congqin Qin Rui Chang Chengkang Li Ming Mao Dali |
| |
| Institution: | 1.State Key Laboratory of Metal Matrix Composites;Institute of Microelectronic Materials and Technology;School of Materials Science and Engineering;Shanghai Jiao Tong University;Shanghai 200240;China;2.State Key Laboratory of High Performance Ceramics and Superfine Microstructure;Shanghai Institute of Ceramics;Chinese Academy of Sciences;Shanghai 200050;China |
| |
| Abstract: | With Ti35Nb alloy as a substrate,Nb-doped TiO2 nanotube arrays were fabricated through the anodization and mid-temperature heat-treatment.The Pt electrode was fabricated on the surface of the nanotube arrays through the mask and sputtering technique.Hydrogen sensing properties of the Nb-doped TiO2 nanotube arrays were tested in the dilute hydrogen atmosphere.Experimental results indicate that the anodization temperature has a great impact on the formation of uniform nanotubes.Under an anodization voltage of... |
| |
| Keywords: | hydrogen sensor titania nanotubes anodization doping effect |
| 本文献已被 CNKI 万方数据 等数据库收录！ |
|
