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Floating-island TFT leakage caused by process step reduction
Authors:Tsujimura  T Tokuhiro  O Morooka  M Miyamoto  T Miwa  K Yoshimura  Y Andry  P Libsch  F
Institution:LCD Tech. Dev., IBM Japan, Kanagawa;
Abstract:The leakage mechanism for a top-gate thin-film transistor (TFT) produced using the fewest process steps in the industry is analyzed in order to achieve a high-contrast liquid crystal display (LCD). Using a T-shaped TFT structure, the OFF and ON channel lengths are defined independently, so that the leakage can be reduced with no ON current decrease
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