| F离子弹性反冲法分析固体中H的深度分布 |
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| 引用本文： | 刘家瑞,朱沛然,封爱国,李大万.F离子弹性反冲法分析固体中H的深度分布[J].物理学报,1988,37(1):71-76. |
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| 作者姓名： | 刘家瑞 朱沛然 封爱国 李大万 |
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| 作者单位： | (1)中国科学院物理研究所; (2)中央民族学院物理系 |
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| 摘 要： | 本文报道7—8MeVl4+离子弹性反冲法(ERD)分析固体中H的深度分布。实验和理论分析表明,近表面处的深度分辨率为200—300?。探讨了散射几何条件和入射能量等的最佳化问题。比较了同一样品用F离子ERD法与6.4MeV1H(19F,αγ)16O核反应法(NRA)的测试结果。表明F离子ERD法是快速(5—10min)、低辐照(5—10μC)、深度分辨和灵敏度较好的分析固体中H的深度分布的一种方法。
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| 收稿时间： | 1987-02-18 |
DETERMINATION OF HYDROGEN DEPTH PROFILE IN SOLIDS BY DETECTION OF RECOILED PROTON WITH MeV F IONS |
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| LIU JIA-RUI,ZHU PEI-RAN,FENG AI-GUO and LI DA-WAN.DETERMINATION OF HYDROGEN DEPTH PROFILE IN SOLIDS BY DETECTION OF RECOILED PROTON WITH MeV F IONS[J].Acta Physica Sinica,1988,37(1):71-76. |
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| Authors: | LIU JIA-RUI ZHU PEI-RAN FENG AI-GUO and LI DA-WAN |
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| Abstract: | Depth profiling of hydrogen in solids has been performed by Elastic Recoil Detection (ERD) with multicharged F ions at a 1.7 MV Tandem accelerator. Both experimental and theoretical analysis show the depth resolution of about 200-300 ? in the near-surface regions of solids. The optimization of the experimental conditions such as scattering geometry and incident beam energy are discussed. The comparison of ERD with multicharged F ions and 1H(19F,αγ)16O resonance reaction at 6.4 MeV for the same samples demonstrated that hydrogen profiling by ERD with F ions is a fast and economic method with low radiation damage and perfect depth resolution.
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