微波共振探针及其在等离子体诊断中的应用

介绍了能够测量稳定和时变等离子体电子密度的微波共振探针，给出了其工作原理和在测量稳定、时变和瞬态等离子体电子密度中的应用。分析了传输模式和反射模式的工作过程及对测量范围、测量精度和空间分辨率等影响因素。结果表明，选用较长的探针有利于提高电子密度的测量范围和精度；选用的微波扫频源高端频率越高，频率分辨率越高，则电子密度的测量范围越大，测量精度越高。理论分析得出系统可测量的电子密度约为1.37×10⁸~4.1×10¹¹cm^-3。

Microwave resonator probe and its application in plasma diagnosing

The microwave resonator probe (hairpin resonator probe), which can be used to measure the electron density of steady and time-resolved plasma, together with the working principle and application of this probe are presented. The process of transmission mode and reflection mode, as well as the effects on measurement range, test precision and the space-resolving capability are analyzed and investigated. It reveals that a longer probe will be efficiency to enhance the test precision and to broaden the measurement range, and choosing the microwave-sweeping source with higher frequency and higher resolving capability will be of the same function. The theoretical analysis shows that the electron density diagnosed by this probe is about 1.37×10⁸~4.1×10¹¹cm^-3.