基于正交超声驻波场的粒子运动建模和控制

为了获得具有均匀的倒金字塔表面微结构的多晶硅,提出了一种新腐蚀加工方法。通过建立一个相互正交的超声驻波场,来协助硅的化学侵蚀并改善其对光的吸收能力。首先对硅片表面结构进行一些比较,在二维上建立网格状的数学模型。然后建立网格中粒子运动的控制理论模型,并进行仿真验证。最后设计实验用于检验超声驻波对粒子的运动控制效果。多晶硅侵蚀结果说明将超声驻波应用在网格化微加工上是可行、可靠的。

Modeling and controlling of particles' motion based on dimensionally orthogonal ultrasonic standing waves

In order to obtain the uniform inverted pyramid micro-structures on the surface of multi-crystalline silicon, this paper presents a new way of using two orthogonal ultrasonic standing waves exerted dimensionally to assist wet chemical erosion and improve the performance of light trapping. A 2D geometrical mode of grid-like arrangements is established firstly after some comparison. Then the theory of particles aggregation motion formatting the grid-like model under the field of ultrasonic standing waves is studied and verified with simulation tool. Experiments are carried out to test the effects of particles controlled motion. The multi-crystalline silicon erosion results illustrate that the idea of application of ultrasonic standing waves on grid micromachining is feasible and excellent.