Excimer laser projection micromachined free-standing polymer films

Projection etching techniques using 308 nm and 248 nm excimer laser illumination have been investigated as a means of micromachining thin free-standing polymer films. Consideration is given to the choice of operating parameters (wavelength, fluence) to minimise damage to the machined structures. High quality grid patterns have been produced on free-standing mylar films with a thickness down to 1.5 μm.