Ellipsometry of precision optical surfaces and mirror coatings

The possibility of testing a surface damaged layer and the cleaning quality of precision optical surfaces using the monochromatic ellipsometry method is discussed. The results of ellipsometric measurements of the thickness homogeneity of nanofilms deposited by the ion-beam sputtering method are analyzed. The results of calculations of the film thicknesses and parameters of surface layers performed by solving an inverse ellipsometric problem are presented. The results of measurements of the thickness of thin films by the profilometric and ellipsometric methods are compared.