| 微透镜阵列的铸塑复制技术 |
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| 引用本文： | 陈祥献. 微透镜阵列的铸塑复制技术[J]. 光子学报, 1998, 27(3): 266-269 |
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| 作者姓名： | 陈祥献 |
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| 作者单位： | 浙江大学高技术现代光学中心 |
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| 摘 要： | 在光刻热熔成型以及电铸复制得到的微透镜阵列镍板基础上,采用静态铸塑技术,得到了高质量的PMMA微透镜阵列。本文介绍了静态铸塑的聚合反应理论基础、模具设计以及工艺过程。最后对微透镜阵列的复制精度进行分析,结果表明复制精度优于0.5μm.
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| 关 键 词： | 微透镜阵列 微光学 铸塑 复制 |
| 收稿时间： | 1997-08-04 |
REPLICATION OF MICROLENS ARRAY BY CASTING PLASTIC |
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| Chen Xiangxian High Technology Optical Center,Zhejiang University,Hangzhou, Received date:--. REPLICATION OF MICROLENS ARRAY BY CASTING PLASTIC[J]. Acta Photonica Sinica, 1998, 27(3): 266-269 |
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| Authors: | Chen Xiangxian High Technology Optical Center Zhejiang University Hangzhou Received date:-- |
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| Affiliation: | Chen Xiangxian High Technology Optical Center,Zhejiang University,Hangzhou,310027 Received date:1997-08-04 |
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| Abstract: | PMMA microlens arrays are fabricated by the replication technology of static casting plastic,on the basis of Nickel mould plate fabricated by melting photoresist and electroforming.This paper discribes the polymerization theory about casting,design of mould and technological routine.Measurements of surface profiles show,the accuracy is better than 0.5μm. |
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| Keywords: | Microlens array Micro optics Casting plastic Replication |
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