Quantitative chemical analysis by ESCA

Electron spectroscopy for chemical analysis (ESCA) can be used as a quantitative tool for the determination of the chemical composition of the surface region of a solid if certain parameters are known. The least well known is the electron mean free path. We present values of the electron mean free path for inelastic scattering as a function of energy for all elemental solids (with the exception of the rare earths and the actinides) and we give formulae for the calculation of the mean free paths for compounds. It is shown that this information makes it possible to deduce from ESCA measurements the relative concentration of atoms or molecules distributed homogeneously in the surface region of a material.