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Molecular Nitrogen Vibrational Temperature in an Inductively Coupled Plasma
作者姓名:康正德  蒲以康
作者单位:DepartmentofElectricalEngineering,TsinghuaUniversity,Beijing100084
摘    要:Using a technique applied previously to vibrationally excited molecular nitrogen (N2^*) in the region of daytime and nighttime aurora,the emission intensity of the N2 second positive band system in an inductively coupled plasma (ICP) has been analysed and the vibrational temperature of nitrogen molecules in the ICP is thus determined.The result shows that the vibrational temperature increases with the increase of the neutral gas pressure from 0.04Pa to 10Pa,then decreases with the further increase of the pressure from 10Pa to 100Pa.Also,this is explained by using the Boltzmann relation between the vibrational temperature and the concentration of the vibrationally excited N2^*(X^1Σg^ ) molecules.

关 键 词:等离子体  感应耦合等离子体  分子氮振动温度
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