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On the absence of oxygen spectral lines in sputtering
Authors:E. Veje
Affiliation:Physics Laboratory II, H.C. Ørsted Institute, Universitetsparken 5, DK-2100 Copenhagen Ø, Denmark
Abstract:It is well established that atomic oxygen spectral lines are normally not observed in optical studies of sputtering processes. We suggest that this can be explained in terms of local variations in the electron density along the solid surface. The model outlined is in accordance with the finding that the yields of secondary ions, secondary electrons, and secondary photons are normally enhanced by presence of oxygen at the target surface.
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