Auger electron spectroscopy (AES) studies of argon ion induced desorption of carbon from tantalum

AES studies of argon ion induced desorption of carbon from tantalum were performed. The carbon adlayer was allowed to adsorb from a well characterized residual gas atmosphere, that was unvarying within 20%. The argon ions impact on the surface at an angle of 60° from the surface normal with energies between 0.2 to 1.0 keV. The total desorption cross section values measured under these conditions are 0.07–1.1 × 10^?15 cm².