Influence of the initial state of adatoms on the ratio of atoms and ions in a sputtered particle flow |
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Authors: | S. Yu. Davydov |
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Affiliation: | (1) A. F. Ioffe Physicotechnical Institute, Russian Academy of Sciences, 194021 St. Petersburg, Russia |
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Abstract: | The role of the initial state of adatoms in the formation of the charge composition of a sputtered particle flow is investigated. Calculations are carried out for alkali metal atoms adsorbed on a tungsten surface and subjected to mutual dipole-dipole repulsion. It is shown that the escape probability (yield) of positive ions diminishes as the surface density of adatoms increases, an effect that is enhanced when the initial state ofthe adatoms is taken into account. Zh. Tekh. Fiz. 69, 116–120 (May 1999) |
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