Determination of sulfur in near-surface layers of materials by means of the32S(3He,p)34mCl nuclear reaction

The cross-sections of the³²S(³He, p)^34mCl nuclear reaction have been determined in the projectile energy region between 4.0 and 12.0 MeV with the aim of their use for the determination of sulfur in surface layers of materials by means of Charged Particle Activation Analysis (CPAA). The measured cross-sections indicate that the application of this reaction for the determination of ppm and sub-ppm concentrations of sulfur is possible depending on the matrix material (e.g. detection limit for S in GaAs is 2 ppm, whereas in Si 300 ppb).