| Vertical－cavity Surface－emitting Lasers Fabricated Twice by Implantation Using TungstenWireasMaskandZincDiffusion |
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| 作者姓名： | JIANG Xiuying DU Guotong LIU Suping ZHAO Fanghai LIU Ying |
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| 作者单位： | Department of Electronic Engineering and National Integrated Optoelectronic Joint Laboratory，Jilin University，Changchun 130023，China |
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| 摘 要： | Ｖｅｒｔｉｃａｌ－ｃａｖｉｔｙＳｕｒｆａｃｅ－ｅｍｉｔｔｉｎｇＬａｓｅｒｓＦａｂｒｉｃａｔｅｄＴｗｉｃｅｂｙＩｍｐｌａｎｔａｔｉｏｎＵｓｉｎｇＴｕｎｇｓｔｅｎＷｉｒｅａｓＭａｓｋａｎｄＺｉｎｃＤｉｆｆｕｓｉｏｎ￥ＪＩＡＮＧＸｉｕｙｉｎｇ；ＤＵＧｕｏｔ...
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| 收稿时间： | 1993/9/6 |
Vertical-cavity Surface-emitting Lasers Fabricated Twice by Implantation Using Tungsten Wire as Mask and Zinc Diffusion |
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| JIANG Xiuying, DU Guotong, LIU Suping, ZHAO Fanghai,LIU Ying.Vertical-cavity Surface-emitting Lasers Fabricated Twice by Implantation Using Tungsten Wire as Mask and Zinc Diffusion[J].中国激光(英文版),1994,3(1):1-4. |
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| Authors: | JIANG Xiuying DU Guotong LIU Suping ZHAO Fanghai LIU Ying |
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| Abstract: | We have designed a novel vertical-cavity surface emitting laser. The epituxiallayer structure grown by molecular beam epitaxy (MBE) contains the p-doped distributed Bragg reflector (DBR) top mirror, the n-doped DBR bottom mirror and GaAs active region. The structure is obtained by twice deep H+ implantutions which use the crossed tungsten wire as an implantetion mask and by zinc diffusion. The lasing wavelength is about 890nm and the thresholdcurrents are 500~700 mA under room-temperature pulsed conditions. |
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| Keywords: | vertical-cavity surface-emitting laser |
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