TEM investigation of TiNx-PACVD-coatings

The wear resistance of cermet cutting tools can be remarkably increased by TiN_x coatings. These layers are deposited at substrate temperatures of 723 K, 773 K and 973 K using a plasma-assisted chemical vapour deposition (PACVD) process. TEM investigations combined with EDXS analysis and electron diffraction gave information on structure and composition of the TiN_x layers and the interface range. X-ray structure investigations were performed additionally.The structure and the chlorine content of layers and interfaces change in dependence on the deposition temperature. All coatings show a columnar structure, but the fibre diameter increases with temperature. The fine-grained TiN_x layer deposited at 723 K has the highest chlorine content, a low-developed columnar structure and a 111 texture. The coatings deposited at 773 K and 973 K contain less chlorine impurities and have a 100 preferred orientation. The fibre structures at 723 K and 773 K can be resolved into single crystallites. By TEM investigations the fibres formed at 773 K are proved to be an accumulation of neighbouring and similarly oriented crystallites. Grain size determined by X-ray analysis and fibre diameter agree with each other. Grain sizes determined more exactly from TEM images are 6 nm at 723 K, 10 nm at 773 K and 30 nm at 973 K. In the interface region the thickness and the chlorine content of this zone decreases with increasing deposition temperature and simultaneously the layer adhesion increases.Dedicated to Professor Dr. rer. nat. Dr. h.c. Hubertus Nickel on the occasion of his 65th birthday