| 大口径非球面精磨表面形状检测技术研究 |
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| 引用本文： | 唐健冠,伍凡,吴时彬. 大口径非球面精磨表面形状检测技术研究[J]. 光学技术, 2001, 27(6): 509-511 |
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| 作者姓名： | 唐健冠 伍凡 吴时彬 |
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| 作者单位： | 中国科学院光电技术研究所, |
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| 摘 要： | 介绍了一种大相对口径非球面精磨阶段面形的测量方法原理及实现其功能的软件设计。利用机械接触式装置 ,通过长导轨及其光栅探头的高度变化来直接测量非球面的矢高 ,并把所测得的三维数据传输给计算机。经数据修正和预处理 ,通过MATLAB软件计算得到整个镜子的面形特征参数。其结果用来指导大口径非球面的精磨加工。
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| 关 键 词： | zernike多项式 最小二乘法 波面 局部插值法 |
| 文章编号： | 1002-1582(2001)06-0509-03 |
| 修稿时间： | 2001-05-05 |
Research on testing techniques for larger aperture aspherical surface in the fine grinding stage |
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| TANG Jian-guan,WU Fan,WU Shi-bin. Research on testing techniques for larger aperture aspherical surface in the fine grinding stage[J]. Optical Technique, 2001, 27(6): 509-511 |
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| Authors: | TANG Jian-guan WU Fan WU Shi-bin |
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| Abstract: | The measurement method and principle as well software designed to implement their functions for large aperture aspherical surface in the fine grinding stage are introduced. The contact mechanical equipment measures aspherical vector highness directly by a grating probe , and the three dimension data tested are transferred to a computer. After correcting data and pretreating, characteristic parameter of whole aspherical surface is obtained by MATLAB software. The tested result is used to guide manufacturing in the fine grinding stage. |
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| Keywords: | zernike polynomials fit least square method wave front local interpolation algorithm |
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