Spectroscopic evaluation of a compact magnetically boosted radiofrequency glow discharge for time-of-flight mass spectrometry |
| |
| Authors: | P. Vega J. Pisonero N. Bordel A. Tempez M. Ganciu A. Sanz-Medel |
| |
| Affiliation: | (1) Department of Physics, Faculty of Science, University of Oviedo, c/ Calvo Sotelo s/n, 33007 Oviedo, Spain;(2) Horiba Jobin Yvon, 91160 Longjumeau, France;(3) Plasma and Radiation Physics, National Institute of Lasers, 077125 Bucharest-Magurele, Romania;(4) Department of Physical and Analytical Chemistry, Faculty of Chemistry, University of Oviedo, 33006 Oviedo, Spain |
| |
| Abstract: | A compact magnetically boosted radiofrequency glow discharge (GD) has been designed, constructed and its analytical potential evaluated by its coupling to a mass spectrometer (MS). Simple modifications to the original source configuration permitted the insertion of permanent magnets. Small cylindrical Nd–Fe–B magnets (∅ = 4 mm, h = 10 mm) were placed in an in-house-modified GD holder disc that allows easy and fast exchange of the magnets. The different processes taking place within the GD plasma under the influence of a magnetic field, such as sputtering, ionisation processes and ion transport into the MS, were studied using different GD operating conditions. Changes to the ionisation and ion transport efficiency caused by the magnetic field were studied using an rf-GD-TOFMS setup. A magnetic field of 60–75 gauss (G) was found not to affect the sputtering rates but to enhance the analyte ion signal intensities while decreasing the Ar species ion signals. Moreover, magnetic fields in this range were shown not to modify the crater shapes, enabling the fast and sensitive high depth resolved analysis of relatively thick coated samples (micrometre) by using the designed compact magnetically boosted rf-GD-TOFMS. |
| |
| Keywords: | Magnetic field Radiofrequency glow discharge time-of-flight mass spectrometry Depth profiling |
| 本文献已被 SpringerLink 等数据库收录！ |
|
