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表面波型微波感偶低气压氦等离子体空间分辨光谱诊断
引用本文:雷杰,傅宏郎.表面波型微波感偶低气压氦等离子体空间分辨光谱诊断[J].光学学报,1992,12(6):91-495.
作者姓名:雷杰  傅宏郎
作者单位:云南大学物理系 昆明650091 (雷杰),云南大学物理系 昆明650091(傅宏郎)
基金项目:国家自然科学基金资助的项目
摘    要:用光学多道分析仪考察了低气压表面波型微波感氦偶等离子体的发射光谱.经过阿贝尔(Abel)反演变换后,得到了在各种气压和微波功率下此等离子体光谱辐射光强和激发温度的空间分布及其变化规律.讨论了此等离子体的激发机理.推算了其中亚稳态原子的空间分布情况.

关 键 词:微波感偶    等离子体  光谱
收稿时间:1991/2/28

Spatially resolved spectroscopic diagnostics of a low pressure helium microwave-induced plasma sustair ed ty a suriaticn
LEI JIE AND Fu HONGLANG.Spatially resolved spectroscopic diagnostics of a low pressure helium microwave-induced plasma sustair ed ty a suriaticn[J].Acta Optica Sinica,1992,12(6):91-495.
Authors:LEI JIE AND Fu HONGLANG
Abstract:Emission spectra of a low pressure helium microwave-induced plasma sustained by a surfatron were studied with OMA-3. After Abel inversion, the spatial distributions of emission spectrum intensities and excitation temperatures of the plasma were given out at different helium pressures and microwave powers. The exoitating mechanism of the plasma was discussed. The spatial distributions of metable population of the plasma were estimated.
Keywords:microwave induced  helium emission spectra  excitation temperature  helium metastable  spatial distribution characteristics    
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