Multiplex H_2 CARS thermometry in a microwave assisted diamond CVD plasma

Rapid temperature measurements in a low pressure, microwave assisted, diamond CVD plasma are reported. By using a “modeless” laser as the Stokes source for H CARS, accurate single-shot and averaged temperatures were obtained which agreed with values obtained from laser induced fluorescence measurements. The speed of data acquisition afforded by multiplex CARS allowed variations of temperature to be monitored with changing plasma conditions induced by variations of pressure, gas composition and microwave power. The application of the technique for “on-line” monitoring of plasma processes is briefly discussed. Received: 13 February 1996 / Accepted: 12 June 1996