| 一种简单的表面加工多晶硅薄膜热扩散率在线测试结构 |
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| 引用本文： | 戚丽娜,黄庆安,李伟华. 一种简单的表面加工多晶硅薄膜热扩散率在线测试结构[J]. 电子学报, 2006, 34(8): 1549-1552 |
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| 作者姓名： | 戚丽娜 黄庆安 李伟华 |
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| 作者单位： | 东南大学MEMS教育部重点实验室,江苏,南京,210096;东南大学MEMS教育部重点实验室,江苏,南京,210096;东南大学MEMS教育部重点实验室,江苏,南京,210096 |
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| 基金项目： | 国家高技术研究发展计划(863计划) |
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| 摘 要： | 本文提出了一种表面加工多晶硅薄膜的在线测试结构.模型综合考虑了辐射、对流以及向衬底的传热等因素的影响,通过分析两个长度不同但宽度与厚度相同的梁在相同加热电流下的瞬态电阻变化特性,来提取多晶硅薄膜的热扩散系数.用ANSYS软件验证了该模型的正确性,通过实验测得表面加工多晶硅薄膜的热扩散率为1.059×10-5±3×10-6m2/s.
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| 关 键 词： | 多晶硅薄膜 热扩散率 瞬态特性 |
| 文章编号： | 0372-2112（2006）08-1549-04 |
| 收稿时间： | 2005-10-18 |
| 修稿时间： | 2005-10-182005-12-29 |
On-Line Extraction for Thermal Diffusivity of Surface-Micromachined Polysilicon Thin Films |
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| QI Li-na,HUANG Qing-an,LI Wei-hua. On-Line Extraction for Thermal Diffusivity of Surface-Micromachined Polysilicon Thin Films[J]. Acta Electronica Sinica, 2006, 34(8): 1549-1552 |
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| Authors: | QI Li-na HUANG Qing-an LI Wei-hua |
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| Affiliation: | Key Laboratory of MEMS of Ministry of Education,Southeast University,Nanjing,Jiangsu 210096,China |
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| Abstract: | A test structure to measure the diffusivity of polysilicon thin films is proposed.The radiant heat loss and the convective heat loss from the structure have been considered.The same heating constant current is applied in the two beams,with the same width and thickness but variant length.The change of resistance with time up to thermal steady state is measured using a separation circuit,and then thermal diffusivity can be obtained.The model has been verified by ANSYS.The experiments show a thermal diffusivity of 1.059×10-5±3×10-6m2/s. |
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| Keywords: | polysilicon thin films thermal diffusivity transient characteristic |
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