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Polar curves for transmission ellipsometry
Authors:RMA Azzam
Institution:Division of Hematology, University of Nebraska, College of Medicine, Omaha, Nebraska 68105, USA;Electrical Materials Laboratory, College of Engineering, University of Nebraska, Lincoln, Nebraska 68508, USA
Abstract:For three-phase ambient-film-substrate systems, the ratio ?T = Tp/Ts of the complex amplitude-transmission coefficients Tp and Ts for light polarized parallel (p) and perpendicular (s) to the plane of incidence is related to a complex exponential function of film thickness d by a bilinear transformation. This observation leads to elucidation of the nature of the complex plane polar curves of the function ?T(d), where the film thickness is variable and the angle of incidence is fixed. In particular, the polar curve ?T(d) for a transparent ambient-film-substrate system studied by transmission ellipsometry is shown to be exactly a circle.
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