| 电子器件制造过程中的一种均匀化加热法的数值研究 |
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| 引用本文： | 赵耀华,刘志刚,鹤田隆治.电子器件制造过程中的一种均匀化加热法的数值研究[J].工程热物理学报,2003,24(5):870-872. |
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| 作者姓名： | 赵耀华 刘志刚 鹤田隆治 |
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| 作者单位： | 1. 中国科学院工程热物理研究所,北京,100080
2. 九州工业大学机械系,北九州,804-8550,日本 |
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| 基金项目： | 国家自然科学基金(No.59906006) |
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| 摘 要： | 本文提出了喷嘴沿被加热物体宽度方向往复移动式射流冲击加热方法,该加热方法可提高被加热物体的等温性。通过进行数值模拟,得到了在任意时刻,被加热物体的温度分布及全体计算时间内被加热物体表面平均温度分布,进而得到了喷嘴移动周期与被加热物体的等温性的关系。
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| 关 键 词： | 射流冲击 均匀加热 微电子制造 |
| 文章编号： | 0253-231X(2003)05-0870-03 |
| 修稿时间： | 2002年12月25 |
NUMERICAL STUDY ON A UNIFORM HEATING METHOD IN MANUFACTURE PROCESS OF ELECTRONIC PRODUCTS |
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| ZHAO Yao-Hua LIU Zhi-Gang Takaharu Tsuruta.NUMERICAL STUDY ON A UNIFORM HEATING METHOD IN MANUFACTURE PROCESS OF ELECTRONIC PRODUCTS[J].Journal of Engineering Thermophysics,2003,24(5):870-872. |
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| Authors: | ZHAO Yao-Hua LIU Zhi-Gang Takaharu Tsuruta |
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| Abstract: | A novel uniform heating method by impinging jet moving to-and-fro along the width of a heating object was proposed in this paper. By this method, isothermal characteristics of the heating object were promoted. A numerical simulation for this method was implemented to get the temperature distribution of the heating object and the average temperature distribution throughout the calculation time. Furthermore, the relation between the moving period of the nuzzle and the isothermal characteristics of the heating object was obtained. |
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| Keywords: | impinging jet uniform heating method manufacture of micro-electronics |
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