| Chalcogenide Random Access Memory Cell with Structure of W Sub-Microtube Heater Electrode |
| |
| 引用本文： | 刘波 冯高明 吴良才 宋志棠 刘奇斌 封松林 CHEN Bomy. Chalcogenide Random Access Memory Cell with Structure of W Sub-Microtube Heater Electrode[J]. 中国物理快报, 2007, 24(1): 262-264 |
| |
| 作者姓名： | 刘波 冯高明 吴良才 宋志棠 刘奇斌 封松林 CHEN Bomy |
| |
| 作者单位： | [1]Laboratory of Nanotechnology, Shanghai Institute of Microsystem and Information Technology, Chinese Academy of Sciences, Shanghai 200050 [2]Silicon Storage Technology, Inc. 1171 Sonora Court, Sunnyvale, CA 94086 USA |
| |
| 基金项目： | Supported by the National Basic Research Program of China under Grant No 2006CB302700, Chinese Academy of Sciences （Y2005027）, and the Science and Technology Council of Shanghai （05JC14076, 0552nm043, AM0517, 06QA14060, 06XD14025, 0652nm003, 06DZ22017）. |
| |
| 摘 要： | In order to reduce the reset current of cllalcogenide random access memory; a W sub-microtube heater electrode with outer/inner diameter of 260/100nm, which was fabricated with standard 0.184-μm technology, is proposed for the first time to achieve a reset current of about 0.5 mA. The reasons may be that sub-microtube increases the number of electrode edge and thermal efficiency is improved greatly because the thermal density on the edge of sub-microtube electrode is generally the highest.
|
| 关 键 词： | 硫族化合物 记忆细胞 加热器 电极 |
| 修稿时间： | 2006-09-18 |
Chalcogenide Random Access Memory Cell with Structure of W Sub-Microtube Heater Electrode |
| |
| LIU Bo,FENG Gao-Ming,WU Liang-Cai,SONG Zhi-Tang,LIU Qi-Bin,FENG Song-Lin,CHEN Bomy. Chalcogenide Random Access Memory Cell with Structure of W Sub-Microtube Heater Electrode[J]. Chinese Physics Letters, 2007, 24(1): 262-264 |
| |
| Authors: | LIU Bo FENG Gao-Ming WU Liang-Cai SONG Zhi-Tang LIU Qi-Bin FENG Song-Lin CHEN Bomy |
| |
| Affiliation: | Laboratory of Nanotechnology, Shanghai Institute of Microsystem and Information Technology, Chinese Academy of Sciences, Shanghai 200050Silicon Storage Technology, Inc. 1171 Sonora Court, Sunnyvale, CA 94086 USA |
| |
| Abstract: | |
| |
| Keywords: | 85.35.-p 85.30.De 73.90.+f |
| 本文献已被 维普 等数据库收录！ |
| 点击此处可从《中国物理快报》浏览原始摘要信息 |
|
点击此处可从《中国物理快报》下载免费的PDF全文 |
|
