AIB induced chemical reactions at surfaces detected by SIMS |
| |
| Authors: | Gerald M. Lancaster Fumihiro Honda Yasuo Fukuda J.Wayne Rabalais |
| |
| Affiliation: | Department of Chemistry, University of Houston, Houston, Texas 77004, USA |
| |
| Abstract: | Secondary ion mass spectrometry (SIMS) has been used to detect the reactions induced by active ion bombardment (AIB) of N+2 on surfaces of pyrolytic graphite and a (100) Si crystal. The SIMS spectra exhibit ions of CN?, HCN?, HnC2N?(n = 2, 3, 4), HN?, and SiN?, indicating that reactions take place with the graphite and silicon as well as adsorbed hydrogen on the surfaces. |
| |
| Keywords: | |
| 本文献已被 ScienceDirect 等数据库收录！ |
|
