| Si基热光可调谐窄带平顶滤波器 |
| |
| 引用本文： | 左玉华,蔡晓,毛容伟,王启明.Si基热光可调谐窄带平顶滤波器[J].半导体学报,2005,26(11):2218-2222. |
| |
| 作者姓名： | 左玉华 蔡晓 毛容伟 王启明 |
| |
| 作者单位： | 中国科学院半导体研究所,集成光电子学国家重点实验室,北京,100083;中国科学院半导体研究所,集成光电子学国家重点实验室,北京,100083;中国科学院半导体研究所,集成光电子学国家重点实验室,北京,100083;中国科学院半导体研究所,集成光电子学国家重点实验室,北京,100083 |
| |
| 基金项目： | 国家重点基础研究发展计划(973计划)
,
国家科技攻关项目
,
中国科学院资助项目 |
| |
| 摘 要： | 利用Si基键合技术、台阶型F-P腔结构以及Si良好的热光效应,研制了一种新型全Si基的热光调谐窄带平顶滤波器.器件的平顶宽度为2nm,3dB带宽为4.4nm,自由谱宽约为8.5nm,在外加电场作用下,共振峰红移3.3nm.
|
| 关 键 词： | 平顶滤波器 热光调谐 Si基 窄带 |
| 文章编号： | 0253-4177（2005）11-2218-05 |
| 收稿时间： | 2005-04-12 |
| 修稿时间： | 2005-05-20 |
Fabrication of a Novel Si-Based Thermo-Optical Tunable Flat-Top Filter with Narrow Band |
| |
| Zuo Yuhu,Cai Xiao,Mao Rongwei and Wang Qiming.Fabrication of a Novel Si-Based Thermo-Optical Tunable Flat-Top Filter with Narrow Band[J].Chinese Journal of Semiconductors,2005,26(11):2218-2222. |
| |
| Authors: | Zuo Yuhu Cai Xiao Mao Rongwei and Wang Qiming |
| |
| Institution: | National Key Laboratory of Integrated Opto-Electronics,Institute of Semiconductors,Chinese Academy of Sciences,Beijing 100083,China;National Key Laboratory of Integrated Opto-Electronics,Institute of Semiconductors,Chinese Academy of Sciences,Beijing 100084,China;National Key Laboratory of Integrated Opto-Electronics,Institute of Semiconductors,Chinese Academy of Sciences,Beijing 100085,China;National Key Laboratory of Integrated Opto-Electronics,Institute of Semiconductors,Chinese Academy of Sciences,Beijing 100086,China |
| |
| Abstract: | Based on a step-type F-P cavity structure,a novel all Si-based thermo-optical tunable flat-top filter with narrow band is fabricated,using our patent SOR(silicon-on-reflector) bonding technology.The device demonstrates a flat-top width of 2nm,3dB band of 4.4nm,FSR(free spectra range) of 8.5nm,and a red-shift of the transmittance peak of 3.3nm under the applied voltage. |
| |
| Keywords: | flat-top filter thermo-optical tunability Si-base narrow band |
| 本文献已被 CNKI 维普 万方数据 等数据库收录！ |
| 点击此处可从《半导体学报》浏览原始摘要信息 |
| 点击此处可从《半导体学报》下载免费的PDF全文 |
|
