| 气相色谱—裂解炉联用分析硅氨烷高温裂解逸出气体 |
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| 引用本文： | 盘毅 谢凯. 气相色谱—裂解炉联用分析硅氨烷高温裂解逸出气体[J]. 分析化学, 1997, 25(12): 1410-1412 |
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| 作者姓名： | 盘毅 谢凯 |
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| 作者单位： | 国防科技大学材料工程与应用化学系 |
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| 摘 要： | 以气相色谱与高温裂解炉联用，对用于制备Ｓｉ－Ｃ－Ｎ微粉的前体「ＳｉＣｘＮｙＨｚ」ｎ在Ａｒ气条件下高温裂解过程中所逸出的ＣＨ４、Ｈ２气体进行了分析。
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| 关 键 词： | 气相色谱 裂解 CVD 硅氨烷 Si－C－N微粉 纳米微粉 |
Gas Chromatographic Analysis of Gases in the Pyrolysis |
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| Pan Yi,Xie Kai,An Lihua,Zhang Changrui,Chen Yimin. Gas Chromatographic Analysis of Gases in the Pyrolysis[J]. Chinese Journal of Analytical Chemistry, 1997, 25(12): 1410-1412 |
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| Authors: | Pan Yi Xie Kai An Lihua Zhang Changrui Chen Yimin |
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| Abstract: | The present paper describes the analysis of the gases evolved during the pyrolysis of silazane precursor with a combined gas chromatography/pyrolysis oven system. The effects of the pyrolysis time and pyrolysis temperature on the amount of CH4, H2 and free car-bon produced in the pyrolysis in argon were discussed. |
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| Keywords: | Gas chromatography pyrolysis precursor |
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