The electron temperature distribution of laser erosion plume after ablation of a tantalum target with excimer laser in vacuum |
| |
| Authors: | O A Novodvorsky C Wenzel J W Bartha O D Khramova E O Filippova |
| |
| Institution: | a Institute on Laser and Information Technologies, Russian Academy of Science (ILIT RAS), Svyatoozerskaya st. 1, 140700 Shatura, Moscow Region, Russia;b Institute of Semiconductor and Microsystems Technology, Dresden University of Technology, D-01062 Dresden, Germany |
| |
| Abstract: | The erosion plume resulting from an ablation of a tantalum target in vacuum with an excimer laser radiation (308 nm) was studied using the Langmuir probe technique. The spatial and temporal dependencies of the electron probe currents were obtained in real time. The electron temperature of different plume regions was determined from a series of I–U characteristics taken at different distances between the probe and the target. We determined that the plume electron temperature is non-uniform and has a maximum value in front of the plume. |
| |
| Keywords: | Laser Ablation Tantalum Electron temperature |
| 本文献已被 ScienceDirect 等数据库收录！ |
