| 多功能微波等离子体教学研究装置的研制 |
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| 引用本文： | 张磊,侯想,胥明,夏明荣,马志斌. 多功能微波等离子体教学研究装置的研制[J]. 大学物理, 2009, 28(6) |
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| 作者姓名： | 张磊 侯想 胥明 夏明荣 马志斌 |
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| 作者单位： | 武汉工程大学,等离子体化学与新材料省重点实验室,湖北,武汉,430074;杭州大华仪器制造有限公司,浙江,杭州,311400 |
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| 基金项目： | 国家级教学研究项目，湖北省教育厅教学研究项目 |
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| 摘 要： | 针对目前国内等离子体技术的教学和研究远远落后于工程应用的实际情况,开发了多功能微波等离子体教学研究装置.该装置利用频率2.45 GHz的微波激励稀薄气体放电,形成轴对称的等离子体球,产生的等离子体无内部电极,可避免放电污染.同时通过微波技术、真空技术、冷却技术的集成,使该装置结构紧凑、性能稳定、性价比较高.利用该装置进行了金刚石薄膜沉积与离子体诊断实验,效果良好.
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| 关 键 词： | 微波等离子体 金刚石膜沉积 离子体诊断 |
Development of multifunctional microwave plasma teaching and investigation device |
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| ZHANG Lei,HOU Xiang,XU Ming,XIA Ming-rong,MA Zhi-bin. Development of multifunctional microwave plasma teaching and investigation device[J]. College Physics, 2009, 28(6) |
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| Authors: | ZHANG Lei HOU Xiang XU Ming XIA Ming-rong MA Zhi-bin |
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| Affiliation: | 1. Hubei Province Key Laboratory of Plasma Chemistry & Advanced Materials;Wuhan Institute of Technology;Wuhan 430074;China;2. Hangzhou Dahua Apparatus Manufacture Co. Ltd;Hangzhou 311400;China |
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| Abstract: | Multi-functional microwave plasma teaching and investigative device are developed for the colossal distance between teaching investigation and application of plasma technology.The frequency 2.45 GHz microwave incentive rarefied gas discharge is used to form axisymmetric plasma.Plasma without the internal electrode can avoid discharge pollution.Microwave,vacuum and cooling technologies have been integrated in the device,so it is stability and cost-effective.The equipment has been used for the experiments of ... |
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| Keywords: | microwave plasma diamond films deposition plasma diagnosis |
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