One-dimensional Wolter optics with a sub-50 nm spatial resolution |
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| Authors: | Matsuyama S Wakioka T Kidani N Kimura T Mimura H Sano Y Nishino Y Yabashi M Tamasaku K Ishikawa T Yamauchi K |
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| Institution: | Department of Precision Science and Technology, Graduate School of Engineering, Osaka University, 2-1 Yamada-oka, Suita, Osaka 565-0871, Japan. matsuyama@prec.eng.osaka-u.ac.jp |
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| Abstract: | We studied an imaging system consisting of an elliptical mirror and a hyperbolic mirror i.e., one-dimensional (1D) Wolter optics] to realize an achromatic full-field hard x-ray microscopy with a resolution better than 50 nm. We report the performance of this 1D Wolter optical system when the mirrors were ultraprecisely figured by elastic emission machining. Experiments to form a demagnified image (demagnification factor of 385) of a 10 μm slit were conducted at an x-ray energy of 11.5 keV at BL29XUL of SPring-8. The system could form a demagnified image with a resolution better than 50 nm over a 12.1 μm field. |
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