| Abstract: | The influence of operating conditions (W/FM parameter: W input energy of rf power; F flow rate of monomer; M molecular weight of monomer) on glow discharge polymerization of tetramethylsilane (TMS) was investigated by infrared spectroscopy and ESCA. Elemental analyses showed that the compositions of the polymers formed strongly depended on the level of the W/FM parameter, i.e., whether the W/FM value was more or less than 190 MJ/kg. The infrared spectra indicated that these polymers were composed of Si? H, Si? O, Si? C, Si? CH3, and Si? CH2 groups, and that there was no significant difference in structural features between polymers prepared at W/FM parameters of more or less than 190 MJ/kg. ESCA spectra (C1s and Si2p core-level spectra) showed that the polymers included carbonized carbon, aliphatic carbon Si? C, C? O, Si? O, and SiO2 species, and that the sum of carbonized and aliphatic carbons reached more than 50%. Raising the W/FM value increased the formation of the carbonized carbon but did not influence the formation of Si units such as Si? C and Si? O groups. From this evidence the rupture of Si? CH3 bonds in the polymer forming process is emphasized. The magnitude of the W/FM parameter may be related to the detachment of hydrogen from the aliphatic carbon units. |
