| 规整膜系层厚允许误差的研究 |
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| 引用本文： | 张晓晖,丁双红. 规整膜系层厚允许误差的研究[J]. 光子学报, 2003, 32(9): 1145-1148 |
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| 作者姓名： | 张晓晖 丁双红 |
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| 作者单位： | 1. 海军工程大学军用光电工程教研室,湖北,武汉,430033
2. 烟台大学光电信息学院,山东,烟台,264005 |
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| 摘 要： | 提出了一种通过计算机模拟薄膜的淀积过程来计算规整膜系层厚允许误差的方法,所计算的层厚允许误差不仅取决于膜系的设计结构,还与薄膜的淀积工艺、镀膜设备的监控精度有关.实验结果表明:采用这种方法所计算出的层厚允许误差对于薄膜的实际镀制具有指导意义.
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| 关 键 词： | 规整膜系 薄膜淀积 层厚允许误差 计算机模拟 |
| 收稿时间： | 2002-09-18 |
| 修稿时间： | 2002-09-18 |
The Study of the Optical-thickness Tolerance of Quarter-Films |
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| Zhang Xiaohui ,Ding Shuanghong Naval University of Engineering,Wuhan,Hubei ,China Yantai University,Yantai,Shandong ,China Received date:. The Study of the Optical-thickness Tolerance of Quarter-Films[J]. Acta Photonica Sinica, 2003, 32(9): 1145-1148 |
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| Authors: | Zhang Xiaohui Ding Shuanghong Naval University of Engineering Wuhan Hubei China Yantai University Yantai Shandong China Received date: |
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| Affiliation: | Zhang Xiaohui 1,Ding Shuanghong 2 1 Naval University of Engineering,Wuhan,Hubei 430033,China 2 Yantai University,Yantai,Shandong 264005,China Received date:20020918 |
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| Abstract: | A new method for estimating the optical thickness tolerance of each layer of a quarter stack has been proposed in this paper. The calculation is based on the computer simulation of optical coating deposition. The calculated result is not only determined by the design structure of the film, but also determined by the depositing approach and the monitoring precision of the thin film coating plant. So the optical thickness tolerance calculated by this method is of directive significance in the practical depositing process for a quarter film system, which is confirmed by experimental results. |
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| Keywords: | Quarter film Optical thickness tolerance Film depositing approach Computer simulation |
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