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D. Herrmann,Schichtendickenmessung; R. Oldenbourg Verlag München,Wien 1993. IX, 354 pp., 176 figs., 43 tabs.; Hardcover,DM 78,-, ISBN 3-486-22203-1 With a contribution by W. Fukarek (Ellipsometric determination of film thickness) |
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| Authors: | M Schmidt |
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