Si/C/F/H materials from laser-explosive decomposition of fluoromethylsilanes

Solid Si/C/H/F materials laser-deposited from gaseous fluoro-methylsilanes are examined by XPS, SEM, IR and Raman spectroscopy and revealed to be a blend of silicon-carbon-based frameworks, possessing some Si-H and C-H bonds, and carbon whose modification is dependent on the structure of the parent fluoromethylsilane. Their properties are affected by contact with the atmosphere: although incorporation of oxygen into silicon-carbon frameworks is a very fast process, the dramatically improved adhesion to aluminium requires long exposure periods.